Retaining Ring
The retaining ring is a core component in CMP equipment, primarily used to hold the wafer. It can improve the non-uniformity of wafer removal rate, thus ensuring wafer flatness and quality, and also enhancing the performance and reliability of semiconductor products.
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Product Characteristics
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Product Parameters
Product Characteristics
Bonding of Stainless Steel and Polymer Materials
High Precision
The part has extremely high requirements for flatness and parallelism.
Product Parameters
| Material: | Stainless Steel and Polymer Material |
| Dimensional Accuracy: | 0.005mm |
